声表面波后工序环节对器件可靠性影响的研究

Research on Effects of End-process on SAW Device Reliability

报道了声表面波(SAW)后工艺环节对基片粘接剂的固化程度、不同制作条件、不同封帽环境制作的滤波器,通过在高温、负温以及高温加速老化后的器件性能变化,来研究SAW器件的可靠性。结果表明:器件的插入损耗随老化时间逐渐增加;器件插入损耗的稳定性明显依赖于封装的湿度和器件表面的状态;器件的气密性随老化时间,器件的老化会更明显。结论是:器件必须要在清洁(净化)的环境中制作,清洁的器件表面第一重要;干燥的封装是器件性能稳定的重要条件;器件、组件老化到一定程度后,将不会有较大的性能变坏现象出现。这些研究成果,对防止或控制高性能器件失效、提高SAW器件可靠性将具有指导性意义。通过加速老化试验的结果也表明:在我们工艺线上制作的SAW器件可靠性水平为6级。

A series of SAW filter samples are tested under high temperature,negative temperature and high temperature accelerate aging.Experiment results show that the insertion loss increases with the aging time,and its stability is largely dependent on the humidity of packaging and the surface of device,and that the hermetic performance of the device decreases with the aging time.Thus the device must be manufactured in clean (purified) room,and packaged in dry ari..Also high temperature accelerate aging test shows the reliability of the SAW filter in our processing line can reach 6 grade of the standard.