压电微作动器相位特性分析与改进

Mechanism Analysis and Improvement on the Phase Lag Property of Piezoelectric Micro Displacement Actuator

误差补偿作动器相位特性等动态性能对补偿控制系统有着非常重要的影响。该文在对压电陶瓷叠堆微位移作动器电压驱动过程分析的基础后,首次给出完整的相位特性分析,分析了影响压电陶瓷微作动器相位特性的三个主要因素及它们相应引起的相位滞后量。计算结果显示出机械结构引起的相位滞后占整个压电微作动器相位滞后量的主要成分。该文分析方法和结果有助于PMDA控制系统优化设计,并使机床误差实时补偿更有效、精确和容易。

The dynamic phase property of micro displacement actuator has much influence on the error compensation control system of precision machining process.On the basis of drive mechanism analysis of micro actuators made of piezoelectric laminated piles,the complete phase property analysis is presented in this paper.Three main factors,which influence the phase property of piezoelectric micro actuators and their corresponding phase lag,are analyzed.The result of calculation and experimental measurement shows that the phase lag caused by mechanical structure is the dominant part of the whole phase lag property of the piezoelectric micro displacement actuator.The analysis method and results is helpful to the control system optimization of piezoelectric micro displacement actuator.