摘要
在 5 0 0℃石英玻璃管基质上 ,化学气相沉积法制备Sb掺杂氧化锡SnO2 ·X膜。研究了元素掺杂量、镀膜温度和退火处理对电阻温度特性的影响。应用实验结果表明 ,SnO2 ·X膜热效率高 ,功率密度达到 42W·cm-2 。
In this paper,SnO 2·X films has been prepared by means of countent Sb on surface of quartz class pipes in chemical vapor deposition system. The effect of element Sb contents as well as reaction temperature and annealing treatment on resistance temperature characteristics of SnO 2·X films were discussed. Results of the application experiments in thermos instrument indicate that the electric heating performance of SnO 2·X films were highly efficient, which power density could reach about 42W/cm 2.
出处
《天津化工》
CAS
2003年第1期7-9,共3页
Tianjin Chemical Industry
