等离子体反应溅射生成SnO_2气体传感器薄膜的研究

Study of SnO_2 Thin Film Gas Sensors from Plasma Reactive Sputtering

利用低温空气等离子体反应溅射技术淀积ＳｎＯ_２薄膜，研究了ＳｎＯ_２薄膜气敏元件对几种 可燃性气体的气敏效应及其性能；通过掺杂提高了元件的选择性，并对反应溅射机理和气敏机理 作了一些探讨．

A method of depositing SnO_2 films by plasma reactive sputtering technique is in- troduced. The sensitivities of the thin fims thus formed to the several combustible gases and their various other properties are studied. Their selectivity has been increased by Pt doping. The mechanisms of reactive sputtering and gas sensor action are also discussed.