透明导电氧化物薄膜的研究进展

Development of Transparent Conductive Oxide Films

综述了TCO薄膜的研究进展和应用前景。ITO薄膜是目前应用最广泛的薄膜,AZO薄膜是研究的热点,具有替代ITO薄膜的潜能。TCO薄膜因具有优异的光电性能而被应用在各种光电器件中,例如,平面液晶显示器,太阳能电池等。随着TCO薄膜制备方法的不断改进、成熟以及聚合物基TCO薄膜的开发,TCO薄膜将具有更广阔的应用和发展空间。

In this paper, the development and application prospect of TCO films are described. At present, ITO is the widest used film, and AZO is the hotspot of TCO films, it will become the substitute- of ITO. TCO films have been widely used in many fields, such as LCD, Solar cells. With the development of preparation methods and polymer substrates, TCO films will have more wide application and development space.