强束流脉冲金属离子束表面改性技术及其应用

Surface Modification Technology and Application of High Flux Pulsed Metal Ion Beam

介绍了强束流脉冲金属离子束技术的基本原理和主要优点,并用由金属蒸汽真空弧离子源(MEWA)引出的强束流脉冲Ti、Mo、W、Ta、C离子对Cr12、H21、H13钢进行了离子注入材料改性试验。注入剂量为3×1017～5×1017cm-2,引出电压为25～48kV,平均束流为25～50μA/cm2。用卢瑟福背散射谱(RBS)测量了注入样品表面的成分,借助X射线行射仪(XRD))和X射线光电子能谱仪(XPS)考察了注入样品的耐磨机理。

Metallic ions extracted from a metal vapor vacuum arc ion source were implanted into die steel,with an implantation dose of 3×1017 - 5×1017cm-2 .extraction acceleration 25 -48kV,and average ion beam flux about 25 - 50μA·cm-2 .Rutherford backscattering spectrum was used to measure the surface composition after ion implantation. Observation of surface oxidizing and mi-crostructure was carried out by x- ray diffration analysis and x-ray photoelectron spectroscopy.