高精度(Δ90°≤0.5″)长方体的制造技术

A processing technology of high precision rectangular parallelepiped

高精度(Δ90°≤0.5″)长方体的制造技术主要包括了加工方法和检测方法两个方面,即长方体的前期加工阶段采用立方体(方砖)形式加工,以保证一个直角的精度;后期是采用分离器单块精抛的加工方式,以保证其平行差。加工过程中用Φ150激光平面干涉仪检测和控制面形及平行度,用LY Φ80棱镜干涉仪检测和控制直角精度。这种制造技术可以将长方体的直角精度做到Δ90°≤0 5″。

A processing technology of high precision rectangular parallelepiped is introduced. It consists of the methods of precessing and testing. Using the method of the cube in earlier stage, ensure the precision of one angle of all. In next stage, a singly block is polished with the tool called polishing separator, to ensure it's parallelism. In the course of processing, the flatness and parallelism of block was tested with a Φ150 laser Fizeau interferometer, the precision of right angle was controlled with the LYΦ80 TwymanGreen interferometer. This processing technology will ensure the precision of right angle of the block to obtain Δ90°≤05″.