镍钛形状记忆合金薄膜的相变温度和力学性能

Transformation Temperature and Mechanical Properties of NiTi Shape Memory Alloy Thin Films

利用直流磁控溅射法溅射沉积了NiTi形状记忆合金薄膜 ,对NiTi形状记忆合金薄膜进行晶化热处理以使其获得形状记忆效应 ,研究了 5 5 0℃晶化热处理 1h后Ti 48 2 %Ni薄膜的相变温度和力学性能。研究结果表明 ,NiTi薄膜 5 5 0℃晶化热处理 1h后 ,升温过程中发生M→A的相变 ,而降温过程中则先发生A→R相变 ,再发生R→M的相变。薄膜的断裂强度随测试温度的升高而增大 ,残余应变随温度的升高而减小 ,当温度大于Af 点时 。

NiTi shape memory alloy films were prepared by DC magnetron sputtering NiTi films were treated to get shape memory effect The transformation temperature and mechanical properties of NiTi films were studied It was found that the DSC curve of NiTi films crystallized at 550 ℃ for 1h shows one peak in heating process and two peaks in cooling process With the temperature increasing, fracture stress of NiTi films increases and residual strain decreases