体硅工艺静电致动微夹持器的试验研究

Electrostatically actuated microgripper based on silicon bulk microma chining

对一种梳状静电致动微夹持器的特性进行了测试。采用显微镜 -CCD -微机测试方案 ,微夹持器的状态信息通过数据采集及图像处理获取 ,得到“电压 -位移”特性曲线并建立了数学方程。对特性方程的分析表明理论设计与试验结果的一致性与合理性。并分析了从设计、加工到测试过程中引起理论设计与实际器件性能差异的主要因素 ,表明现有的微机械设计理论与加工水平存在一定的不足。由试验结果中获取了相关微机械器件的设计经验。

The characteristics of an electrostatically actuated comb-drive microgripp er were tested with its information and status acquired using the t est platfor m of Microscope-CCD-micro-computer. The voltage-d isplacement characteristic was obtained through image processing and analysis. The analysis of the characteristic equation deduced from miscellaneous factors indicates that the theoretical design is rational and consistent with the experimental results. The differenc e between theoretical design and practical device is discussed with the desig n rule, fabrication and experiment process taken into consideration. The causati on demonstrates that present theoretical design and fabrication technology need further improvement to meet the design requirements for micro-electromechanical devices.