微机电系统(ME MS)的仿真和模型分析(英文)

Simulation and model analysis of MEMS

微机电系统 (MEMS)器件及系统仿真正日益受到MEMS研究者的重视。其仿真内容涉及力学、电子学、热学、光学、流体学等许多学科。MEMS和其他微系统可看作为一个多域物理系统。本文从方法学观点讨论了建模方法、计算机辅助模拟工具、多域模型库以及不同仿真器的耦合问题。将电网络概念引入到不同域系统仿真中以及等效电路被应用到不同的物理域系统。对于系统模拟和仿真来说 ,元件模型库的建立非常重要 ,引入多端口元件 ,并用线性和非线性微分方程加以描述。另外 ,本文也简单分析了系统仿真中涉及的降阶问题、模型优化方法以及相关的仿真工具和仿真器间的耦合问题。

The modelling method, computer-aided modellin g tools, multi-domain model libraries, and coupling different simulators are dis cussed from methodologic point of view. The electrical network concept is introd uced in t he simulation of different domain systems, in which equivalent circuits are appl ie d to physical quantities between different domain systems. The building of compo nent model libraries is considered because it is very important for the system m odelling and simulation. The multi-terminal port elements can be introduced and described by linear and nonlinear differential equations. In addition, the o rder reduction problem, model optimization methods, related simulation tools and the coupling between simulators are analyzed.