非球面曲面光学零件超精密加工装备与技术

Ultraprecision machining equipment and technology of aspheric optics

“Nanosys_30 0非球面曲面超精密复合加工系统”是“九五”重点预研课题—“非球面曲面的超精密加工与测量技术”的主要研究成果。重点对非球面曲面光学零件超精密加工机床 ,非球面曲面光学零件超精密加工工艺 ,非球面曲面光学零件超精密测量技术进行了研究。其主要技术成果有 :非球面超精密复合加工系统综合设计和制造技术 ,高速超精密空气静压主轴系统 ,超精密闭式液体静压导轨系统 ,高速超精密空气静压磨头电主轴系统 ,开放式高性能数控系统集成技术等。系统的精度检测和工艺实验表明其研究水平进入了国际先进行列。

Nanosys-300 aspheric optical components ultraprecision machining system is one o f the major research achievements in search for ultraprecision machining and m easuring technology for aspheric components during the 9th five-year plan. The m ajor achievements in search for ultraprec ision machining system, machining technology and measuring technology for optica l components, and design and manufacturing of aspheric optical components ultrap recisio n machining system, high speed ultraprecision aerostatic air bearing spindl e system, ultraprecision closed hydrostatic oil bearing slides, high speed ultraprecision aerostatic air bearing electrical grinder spindle system, o pen high performance CNC system integration technology in particular, are revie wed in detail.