菲涅耳区衍射光学束匀滑器件的设计

Design of diffractive optical element for beam smoothing in Fresnel diffraction region

采用精细化设计方法 ,进行了菲涅耳区衍射光学束匀滑器件的设计 ,利用爬山 模拟退火混合优化算法 ,获得了真实的束匀滑分布 ,不仅控制了算法采样点上的光强分布 ,还控制了其他非采样点上的光强分布。优化得到的束匀滑器件的位相深度小于π ,易于后续加工。

In this paper, the precise design of the diffractive optical element (DOE) is completed for beam smoothing in Fresnel diffraction region. By using the hybrid algorithm, merging Hill-climbing with Simulated Annealing, true beam smoothing has been obtained, the intensity distribution of any point, besides the used sampling point in the optimization, on the output plane is consistent with the demand for beam smoothing. The phase depth of the designed DOE is smaller than π, which is very beneficial for the follow-up fabrication.