化学在半导体硅材料制造业的作用与展望

Application of Chemistry in Semiconductor Silicon Material Manufacturing and Its Prospects

针对半导体集成电路行业的迅猛发展,概述了作为半导体工业基础的半导体硅材料在近20年来的发展状况,着重阐明了当代化学技术及其产品对硅材料制造业发展的重要作用,以及随着硅材料业向更高层次的迈进,给化学化工行业带来的挑战与机遇。

In view of the dramatic development of semiconductor integrated circuit industry, the authors summarize the development process of semiconductor silicon material in the recent 20 years. The authors emphatically expound the great effect of modern chemical technology and its products on the expansion of silicon material manufacturing industry, and the great challenge and opportunity it will bring to chemistry and chemical engineering, with silicon material industry development on a higher level.