基于PCI总线的扫描电镜图像采集系统

Image acquisition system of scanning electron microscope based on PCI bus

图像采集系统是扫描电镜的一个重要组成部分 ,用于控制扫描电镜的扫描电源 ,视频图像采集、数字化与显示 ,电镜主控计算机与底层微机板的通讯和电镜照相。本图像采集系统基于PCI总线接口设计 ,硬件主要设计采用FPGA技术 ,实现了数字电路的模块化设计 ,集成度和灵活性高。目前 。

The image acquisition system of SEM was designed based on the PCI bus to control the scanning generator, the image acquisition, data communication and the photograph system. All digital circuits of the system and PCI Bus interface controller were fulfilled by FPGA with high performance. The product has six modes of the SEM: map scan, line scan, split scan, double scan, analog record and digital record, and has been tested with high performance on KYKY 3800 SEM.