液晶实时掩膜技术制作连续微光学元件

LCD Real-Time Mask Technique for Fabrication of Continuous Microoptical Elements

提出制作连续微光学元件的一种新技术———液晶实时掩膜技术 ,阐述了其基本原理和制作方法。基于部分相干光成像理论 ,采用计算机模拟了用实时掩膜制作微透镜和微轴锥镜阵列的过程。同时建立了实验装置进行实验 ,用全色银盐干板 (Kodak 131)通过酶刻蚀得到口径为 118.7μm ,深为 1.32 2 μm的 5 6× 48的轴锥镜的列阵。

A new technique for fabrication of continuous microoptical elements by using LCD (liquid crystal display) real-time mask is proposed, and its principle and design method are expatiated. Based on partial coherent imaging theory, the process to fabricate the microaxicon and the microlens has been simulated. The experimental setup for LCD real-time mask technique was built, and the micro-axicon array has been fabricated. The 3-dimensional surface relief structure was shaped in the pan chromatic silver-halide sensitized gelatin (Kodak-131) with trypsinase etching. The caliber of axicon is 118.7 μm, and the etching depth is 1.322 μm.