电化学C-V测量AlGaInP LED外延片中载流子浓度的分布

Electrochemical C-V Method for Measuring Distribution of Carriers in AlGalnP LED Epilayers

在实验的基础上,总结了电化学C-V的一些测试经验,提出了一种适用于测量AIGaInP LED外延片中载流子浓度纵向分布的电解液——0.5 mol HCI溶液.综合利用平带电位值(F.B.P)、耗散因子和测量电流等3个测量判据,合理选取测量电压、腐蚀电流等测量参数,获得了速度快、重复性好和数据准确可靠的测试效果.

Some operating experiences for Bio-Rad PN4300PC instrument are summarized. A new kind of electrolyte, 0.5 mol HC1 solution, suitable to measure distribution of carriers in AlGaInP LED epilayers has been determined experimentally. With this kind of electrolyte, by using F.B.P, the dissipation factor and the measuring current as three criteria for the measurement, and by choosing appropriate measuring voltage and etching current, the experimental results can be achieved quickly, reproducibly and reliably.