厚膜力传感器的─体化补偿

Integrated Compensation of Thick Film Force Sensor

对以陶瓷双孔梁为弹性体的新型厚膜力传感器进行了零点温度漂移和零点的─体化补偿。分析了零点温度漂移和零点的补偿方法，在同一陶瓷弹性体上印刷、烧结、制备了厚膜力敏电阻，补偿厚膜热敏电阻及零点补偿厚膜电阻，并较好地是实现了零点温度漂移和零点的补偿。还探讨了补偿用热敏电阻浆料性能的改进。

Integrated compensation techniques ofzero-point temperature shifting and zero-point wereused for the newtype thick film force sensor,inwhich a ceramic double-hole beam acted as an elasticbody,The methods of compensation were analysed,all thick film resistances,including strainresiatances,thermistors and compensating zero-pointresistance were printed and sintered on tbe sameceramic beam. The experimental results showedgood compensation effect.The improvement of theproperty of thick film thermistor paste forcompensation was also discussed.