离子注入法增强YIG单晶薄膜的磁光效应

Magneto─Optic Enhancement of YIG Film by Ion Implantation

利用离子注入技术，将Ｃｅ￣（＋３）离子注入到ＹＩＧ单晶薄膜中，剂量为１０￣（１４）～１０￣（１６）ｉｏｎｓ／ｃｍ￣２，能量为５００ｋｅＶ。对注入前后的样品进行光吸收谱测量，发现注入后的样品光吸收有明显的增加，且样品颜色变深，对样品进行高温退火，可有效地降低光损耗。离子注入样品磁光特性测量表明Ｃｅ￣（＋３）薄膜有很大的磁光增强作用，且法拉第旋转角随注入剂量增加而增大。

Ce￣(+3)ions were implanted into YIG filmwith dose of 10￣(14)～10￣(16) ions/cm￣2 at an energy of500keV. With the increase of Ce￣(+3)ions,the color ofYIG changes from transparent yellowish green todark green. Optical absorption spectra weremeasured for no-implanted,as-implantation andannealed samples. The optical absorption resultedfrom implantation can be decreased by annealing at900℃,The enhancement of Faraday rotation angle isproportion to the implantation dose.