类金刚石碳膜在硬磁盘中的应用

Application of Diamond Like Carbon Film on Rigld Disk

射频离解烃制备了适用于５英寸计算机硬磁盘减摩、耐磨保护用的类金刚石碳膜。保护膜厚度不均匀性小于５％，硬度１５．２ＧＰａ，结合力３３１ＭＰａ。无润滑下头盘摩擦系数μ≤０．２６，脉动值Δμ≤０．０５。最佳效果是在添加润滑油的组合润滑下得到，μ≤０．１４，Δμ≤０．０４．电磁动态特性和读写试验表明，４０ｎｍ类金刚石碳保护盘达到实用水平。

DLC films used as the protectiveovercoats of inches chemically plated magneticdisk were prepared by radio frequency decompositionof hydrocarbon,The thickness heterogeneity of filmsis less than 5%。The average hardness is 15.2GPa;The adhesion is 331MPa。Without lubrication thefriction coefficient and its pulse of head disk are less0.2 6 and 0.05 respectively。The best lubrication isobtained in the case of DLC film adding lubricant;The friction coefflcient ardits pulse are less 0.14 and0.04.The electric-magnetic and read/write testsshow that 40nm DLC films can impart satisfactoryprotection to rigid disks。