反应溅射中靶面附近的粒子输运研究

Study on Particle Transport Near the Target Surface in Reactive Sputtering

列出了各类粒子的产生、输运和它们同靶表面反应的速率方程,并计及高能中性粒子对靶面溅射的剥离速率方程。有关方程耦合后求解溅射速率与气体流量和放电电流的关系。本文强调反应粒子的反应碰撞,论述了从粒子输运出发探讨薄膜生长方法的优点。

The rate equations for particle produce, transport, and reaction with target surface, and sputtering peeling of ion and neutral particles with high energy are established. After these equations coupling up and taking account of other calculations, such as energy distribution functions, macroscopic flow velocity of gas, etc., the relation curves between sputtering rate and inlet flow of reaction gas for different discharge current are obtained, and the advantages of this analysis method are also discussed in the paper.