测试10^5g微阵列式加速度传感器

Measuring 105g Micro Sensor Array of the Acceleration

研究测试 1 0 5g微阵列式加速度传感器的设计与制造。该传感器应用微加工技术制成 ,具有测试加速度值大、响应速度快等特点。应用非线性回归理论及正交试验分析方法 ,解决传感阵列的布阵设计 ;根据理论分析和试验研究 ,提出了 8个传感器位于芯片平面内同一圆周上 8等分处的布阵 ,给出了 8点图形传感阵列的设计版图 ;并制造出微阵列式加速度传感器的样品 ,经测试满足设计要求。

In this paper the design and manufacture of measuring 10 5g micro sensor array of the acceleration is discussed.The micro sensor array of the acceleration is made by the technology of IC manufacture and characterized by measuring large value of the acceleration,and rapid response.The sensor array design is based on non-linear regression analysis and orthogonal experiments.According to the results of the analysis,the design picture of eight-points and the sample of the micro sensor array of the acceleration are obtained.It is satisfied with the demands of the design.