基于LIGA技术的3K-2型微行星齿轮减速器的设计和制造

Design and Fabrication of Micro 3K-2 Type Planetary Gear Reducer Utilizing “LIGA” Technology

使用同步辐射光和 X射线掩模板的 L IGA技术能够制造大深宽比的三维微结构。详细讨论了基于该技术的微行星齿轮减速器的设计和制造 ,包括微行星齿轮减速器的设计、微齿轮 X射线掩模板的 CAD技术、X射线深层光刻、微齿轮的微电铸和微复制 ,以及微行星齿轮减速器的微装配。目前已经得到了金属镍的厚度为 40 0μm的太阳轮、行星轮 ,厚度为 2 0 0μm的固定内齿轮、旋转内齿轮 ,其齿数分别为 1 5、1 1、3 6、3 9。用这些微齿轮装配成了一台模数为 0 .0 3 mm、减速比为 44.2、最大外径为 2 mm的微行星齿轮减速器 ,并将其成功地应用在直径为 2 mm的电磁型微马达上。

The “LIGA” technology can be used to fabricate high aspect ratio microstructures without employing synchrotron light and suitable X-ray mask.In this paper,based on LIGA technology, detailed investigations of design and fabrication of micro 3K-2 type planetary gear reducer, such as design of the micro reducer, CAD of the micro gear mask, X-ray photolithography, micro electroforming, micro molding, have been performed. And 400μm thickness sun gear, 400μm thickness planet gear, 200μm thickness fixed inner gear, and 200μm thickness rotary inner gear, whose tooti number are 15,11,36,39 respectively, have been obtained. Utilizing these gears,a micro reducer whose modulus, outer diameter and velocity ratio are 0 03, 2mm, 44 2 respectively, has been assembled and applied in φ=2mm micro electro magnetic motor successfully.