温度对氮活性粒子(N^+,N_f)轰击阴极壁的影响

Effect of Discharge Temperature upon Active Species(N^+,N_f)

采用蒙特卡罗方法 ,模拟研究了氮直流辉光放电电子碰撞、离解和N+2 电荷交换离解过程 ,产生的活性粒子 (N+,Nf)轰击阴极壁的能量分布随放电气体温度的变化规律 .结果表明 :阴极壁处活性粒子 (N+,Nf)的能量最高且粒子数密度最大 ,最佳放电温度与参数 (P ,Vc)相关联 .模拟结果为等离子体与材料表面的相互作用过程的认识提供了依据 .

Law of active species (N+,N f)energy distribution with discharge temperature changing at cathode well of nitrogen glow discharge is studied. It shows that there is an optimum discharge temperature of species (N+,N f) energy distribution at cathode, and the results are compared with the results of experiment.