摘要
4套前级汇总式分子泵三级抽气机组由包括4套3500L·s-1分子泵、2套600L·s-1罗茨增压泵和2套70L·s-1机械泵组成,对环有效抽速为6 4m3·s-1(H2)。用氦质谱检漏仪、四级场质谱计与氦质谱检漏仪相结合的方法分别进行了零部件和真空室总体检漏,真空室总漏气率≤1.2×10-5Pa·m3·s-1。采用有效除气措施后,HL 2A真空室预装本底压强为1.1×10-4Pa。
The pumping system is a combination of four turbomolecular pumps with three stages pumping for the HL2A vacuum vessel preassembling,giving a total effective pumping speed of 6.4m3·s-1(H2) for the vessel.The leak detection of base element and the vacuum vessel is performed with helium mass spectrometer leak detector and two mass spectrometry.The total leak rate of the vessel is below 1.2×10-5Pa·m3·s-1.The base pressure is 1.1×10-4Pa with suitable prepumping and outgassing.
出处
《核聚变与等离子体物理》
CAS
CSCD
北大核心
2002年第4期232-236,共5页
Nuclear Fusion and Plasma Physics