基于多项式的二维PSD非线性校正算法研究

Research on nonlinear correction algorithm of two-dimensional psd based on polynomials

针对位置敏感探测器PSD的非线性,综合分析现有非线性校正方法,提出利用多项式拟合算法对PSD的非线性进行校正。利用二维平移台搭建二维PSD标定系统,详细论述多项式校正的方法,并通过实验数据对比,选择二元三次多项式完成校正。通过PSD光敏面上不同点的测量对多项式校正算法进行验证。实验结果表明,校正后的测量误差均方差不大于0.0185。

Aiming at the nonlinearity of position sensitive detector(PSD),the existing nonlinear correction methods are analyzed synthetically,and a polynomial fitting algorithm is proposed to correct the nonlinearity of PSD.Two dimensional PSD calibration system is built using two-dimensional translation table,and polynomial correction method is discussed in detail.By comparing the experimental data,the binary cubic polynomial is selected to complete the correction.The correction polynomial correction algorithm is verified by the measurement of different points on the PSD surface.The experimental results show that the mean deviation of the corrected measurement error is less than 0.0185.