水射流辅助激光加工碳化硅的影响研究

Influence of Water Jet Assisted Laser Processing Silicon Carbide

为了研究具有一定速度和角度的水射流在水射流辅助激光加工碳化硅材料中对加工槽体深度、宽度、热影响区的影响,利用Fluent软件,分别以不同速度和不同入射角度的水射流对材料表面冲击力大小的影响进行模拟,从理论上分析冲击力对加工结果的影响,同时进行相关实验验证。结果表明,水射流速度相同时,随着射流入射角度增加,其对槽体表面的冲击力逐渐增大。与无水激光加工相比,水射流辅助激光加工对所得槽体的深度影响较大,对宽度影响很小或基本无影响,热影响区显著降低,槽体底部和槽口处存在较少熔渣和重凝层,加工质量较好。

In order to investigate the effects of a water jet with a certain speed and angle on the depth,width and heat affected zone of the processed groove in the water jet-assisted laser machining of silicon carbide.The Fluent software is used to simulate the effect of water jets at different speeds and different angles of incidence on the surface impact of the material.The impact of impact force on processing results is theoretically analyzed.At the same time,the relevant experiments are carried out for verification.The results show that when the water jet velocity is the same,the impact force on the surface of the groove gradually increases as the incident angle of the jet increases.Compared with the waterless laser processing,the water jet assisted laser processing has a great influence on the depth of the obtained groove,the effect of the width is small,and the heat affected zone is significantly reduced.There are less slag and re-condensation layer at the bottom and notch of the groove,thus the processing quality is better.