金刚石合成过程中电压和功率等加热参数的控制

Research on control of voltage,power and current during diamond synthesis process

为优化金刚石合成过程,计算了当合成腔电阻不稳定时,合成腔有效功率随电阻变化的变化量。并根据计算出的公式对恒电压、恒功率和恒电流等三种加热控制方式的优劣进行了比较。结论是多数情况下,电压法优于恒功率法,恒功率法优于恒电流法。计算出恒电压和恒功率加热控制方法的微调公式,并根据此公式微调电压(或电流/功率),以补偿合成腔的温度漂移,可以使合成腔的温度趋于一致。

In order to optimize the diamond synthesis process,three controlling methods,namely constant voltage,constant power and constant current,are compared on their vibrations when the resistance in the synthesis chamber changes and the effective power is changed.The conclusion is that under most conditions the effect of the constant-voltage method is better than that of the constant-power method,and the effect of the constant-power method is better than that of constant-current method.The fine tuning formulae are brought out under the different controlling methods of constant voltage and constant power.Adjusting fine tuning control according to the fine tuning formulae can make the temperature of the synthesis chamber much more even while compensating the divergence of the resistance.