TP77椭圆偏振光测厚仪功能的拓展研究

Extension of ellipsometer′s function for thickness measure of thin film

成功地将TP77椭圆偏振光测厚仪改装成以卤钨灯或氙灯为光源的广谱椭偏仪 .改装后的椭偏仪不含λ/4波长片 ,而配有一型号为WDG5 0 0 1A的单色仪和一个X Y函数记录仪 ,它可用来测量固体薄膜和片状材料的折射指数n(λ)和消光指数k(λ) .

The ellipsometer with wavelength of 632.8?nm from He Ne laser was re installed into wide area ellipsometer with working wavelength range from infrared to visible light. The xenon lamp or Br W lamp were used as a light source to replace the laser, The re installed ellipsometer, without the λ /4 wavelength slice but with a monochromator and a X Y function register apparatus, is used to measure the refraction exponent n(λ) and extinction exponent k(λ) of a measured material of thin solid films or pieces.