离子注入对钛酸铅膜结构的影响

Structure Change in PbTiO_3 Films Induced by Ion Implantation

我们用Sol-Gel法制备了非晶钛酸铅膜。研究了各种温度下离子注入对其结构的影响。发现注入温度较低时,铅在非晶钛酸铅膜中聚集并结晶;当注入温度较高时,离子注入阻碍晶态钛酸铅的形成而使膜中出现晶态铅和氧化铅。

Lead titanate films prepared by sol-gel process were ion-implanted at various temperature. It was observed that the lead will segregate and crystallize if ion implantation is carried out at room temperature; while it is at high temperature, ion implantation will hider the crystallization of PbTiO_3 and promote the crystallization of Pb and PbO.