摘要
本文用rfPCVD方法,以甲苯为碳源气体,在硅、锗、玻璃、金属等基片上制备出DLC膜,并且用Raman光谱和红外吸收谱研究了膜的结构,还研究了膜的机械、光学、电学性能。
DLC films have been formed by rfPCVD from C_7H_8 gas on the Si, Ge glass and metal…etc. Substrats. The structures and mechaaical, optical and electrical properties of DLC films have been investigated.
出处
《功能材料》
EI
CAS
CSCD
1992年第2期97-100,共4页
Journal of Functional Materials
关键词
DLC膜
结构
性能
DLC film
Structure
property
