类金刚石碳膜的热学特性

Thermal Properties of Diamond-like Carbon Films

利用珀尔帖效应,采用三夹层技术测量了类金刚石碳(DLC)膜的热传导率,并指出在高离子轰击能量和低CH_4气压下。通过rf等离子体沉积所制得的DLC膜具有好的热稳定性,其热传导率为2.1—2.4W/cm.deg。

Thermal conductivity of diamond-like Carbon (DLC) films hase been measured by sandwith technique using the Peltier effect.It is indicated that DLC films prepared via rf-plasma deposition under high ion bombardment energy and low CH_4 pressure have good thermal stability, and the thermal conductivity is 2.1～2.4W/cm· deg.