飞秒激光作用下金膜的微观特性变化

Microscopic Properties Changes of Au Film Under Action of Femtosecond Laser

用磁控溅射的方法在石英基底上制备了金(Au)膜,研究了Au膜在近激光损伤阈值(LIDT)飞秒脉冲激光辐照下的物相结构和表面形貌。结果表明:所制备的Au膜为(111)面取向生长的薄膜;近LIDT的激光辐照使辐照区的Au膜形成大晶粒,并由(111)单一取向变为多晶结构;Au膜晶粒尺寸的增大会导致表面粗糙度增加。实验结果为明确Au膜在飞秒激光作用下的损伤过程及后期应用提供了依据。

Au films are deposited on fused silica substrates using the magnetron sputtering technique. The phase structure and surface morphology of the Au film after femtosecond pulse laser irradiation near laser induced damage threshold(LIDT) are investigated. The results show that the Au film prepared by magnetron sputtering is(111) oriented growth film. Laser irradiation energy near LIDT causes Au film to form large grains in the irradiated area and become polycrystalline structure from(111) single orientation. The increase of grain size leads to the increase of surface roughness. The experimental results provide a certain basis for exploring the damage process and later application of Au film under femtosecond laser.