摘要
为研制红外多元探测器阵列,我们采用柯达法制备了硫化铅(PbS)多晶膜,对它的结构特性和电学特性进行了研究。经过敏化处理的多晶膜微量氧是掺进晶粒间隙或缺陷的部位,形成敏化中心。薄膜中Pb,S,O元素分布是均匀的。 采用电子探针分析方法解决了薄膜表面微量氧的测定。 。 测试结果得出灵敏度高的多晶膜合适的氧含量和载流子密度的范围。
For developing infrared polyelement detector array, we use Kodak method to prepare PbS poly-crystalline film. Its structure and electrical properties have been studied. A small quantity of oxygen on the sensitized polycrystalline film is penetrated into grain boundaries or structural defects, generating sensitizing centers. The elements Pb, S, O are evenly distributed in the film.We used the analytical method of electronic probe to solved the determination of oxygen on the surface of the film.The suitable range of the small quantity of oxygen and that of carrier density of high sensitive polycrystatline films have been obtained by our experiments.
出处
《吉林大学学报(理学版)》
CAS
1980年第2期45-50,共6页
Journal of Jilin University:Science Edition