线纹计量中的对准技术

Aligning Techniques in the Field of Line Scale Metrology

介绍了线纹对准技术的发展以及典型线的纹对准技术及方法,分析各种线纹对准的技术特点及其适用范围。刻线种类的多样性决定了对准方法的多样性,线纹计量的对准技术的发展朝着多元化方向发展。对一些新型特殊的线纹测量器具(微密线纹测量和宽线单边对准测量),介绍了基于光电扫描的对准测量方法。线纹光电自动对准技术可以拓展应用到其它非线纹一维几何参量的计量。

The typical aligning techniques and methods,and the development of aligning techniques for line scale metrology are introduced. Different methods are compared and their features for application scopes are analyzed. Different line scale has its correspondent line aligning method,with the development of diversity of the line scale,aligning techniques present diversities. For some kind of special structure of line scale,the method based on photoelectric scanning,for example,the measurement method of micro & dense line scale and the wide lines scale are introduced. The techniques for line aligning may be developed for other one dimensional geometric parameters with high precision.