高等别线纹尺校准装置及校准方法研究

Study of Calibration System and Calibration Method for High-precision Line Scale

高等别线纹尺广泛用于精密加工及精密测量设备的定位、标定及校准等。为满足长三角地区高端装备制造业对高等别线纹尺的量值溯源需求,提升地方计量机构的量传能力,研制开发了新的激光干涉比长仪装置。在主体结构设计、激光干涉测长、环境监测与补偿等方面进行了精心设计,并利用基准尺等多种仪器,对装置各部分的计量特性进行校准及实验测试。测试结果表明,该装置校准线纹尺达到了基准级的测量精度。

High-precision line scale is widely used for positioning,scaling and calibration of precision machining device and optical precision measuring equipment. For the sake of increasing hierarchy demand for high-precision line scale of high-end equipment manufacturing in Yangtze River Delta region and promoting dissemination ability of the value of quantity of regional measure institute,a new laser interferometric comparator is designed and developed. Elaborate design is proceeded on main structure, laser interferometer, ambient parameter monitor and laser wavelength compensation.Metrological characteristics of the system and its components are tested or calibrated by various standards such as reference scale. The results indicate that the system achieve a precision level of reference standard when calibrating line scale.