关节臂式坐标测量机热变形误差建模及补偿

Modeling and Compensation of Thermal Deformation Error of Articulated Arm Coordinate Measuring Machine

建立了关节臂式坐标测量机(AACMM)结构参数热变形误差的运动学方程,研究了在实验温度约为20℃时关节臂式坐标测量机主要结构参数的温度变化规律和测量误差的变化趋势,建立了基于多元线性回归方法的热变形误差补偿模型并进行验证。实验结果表明:AACMM工作温度上升值最大可达3℃,测量误差随温度上升呈增大趋势,最大长度测量误差可达0. 115 mm。实现了AACMM热变形误差补偿,平均测量误差从0. 0715 mm降到0. 0335 mm,在一定程度上提高了AACMM的测量精度。

The kinematic equation of the thermal deformation error of the AACMM is established. The temperature variation and the measurement error variation trend of the main structural parameters of the AACMM are studied at the experimental temperature of about 20 ℃. A thermal deformation error compensation model based on multiple linear regression method is established and validated. The results show that the AACMM operating temperature rise up to 3 ℃,measurement error increases with temperature tends to increase, the maximum length measurement error of up to0. 115 mm. And the thermal deformation error compensation of AACMM is realized,the average length measurement error decreased from 0. 071 5 mm to 0. 033 5 mm. The measurement accuracy of the AACMM is improved to a certain extent.