试样倾斜对熔融石英硅三棱锥纳米压痕测试的影响

Effects of Sample Tilt on Berkovich Nanoindentation Test of Fused Silica

使用三棱锥压头对不同倾斜角下的熔融石英硅进行纳米压痕实验。结果表明,试样倾斜会影响加载曲线的形状。在相同的载荷下,随着试样倾斜角的增加,压痕最大深度、残余深度及接触深度逐渐减小,但卸载曲线不受影响,彼此保持平行,卸载曲线的拟合参数m及接触刚度值保持恒定。另外,试样倾斜将导致测量的压痕接触面积偏小,从而使得测量的硬度和弹性模量偏大。

Berkovich nanoindentation experiments on a fused silica sample with different tilt angles were carried out.The indentation results show that the tilt of the sample affects the shape of the loading curves. The maximum indentation depth,residual depth and contact depth gradually decrease with the increase of the tilt angle of the specimen at the same indentation load,but the unloading curves are not affected,and they remain parallel to each other,the fitting parameter m of the unloading curves and the value of contact stiffness remain constant regardless of the inclination of the sample. In addition,it is found that the sample tilt will lead to smaller indentation projected contact area,which will make the hardness and elastic modulus larger.