金刚石自支撑膜衬底生长立方Y_2O_3薄膜的性能

Performance of cubic Y_2O_3 films deposited on freestanding CVD diamond substrate

采用射频磁控溅射法在抛光的CVD金刚石膜上制备了立方(222)择优取向的Y2O3薄膜,利用XRD,纳米力学探针,划痕仪,FTIR和TEM等手段研究了退火对Y2O3薄膜的结构、力学性能和红外透过率的影响及Y2O3的微观结构。结果表明:通过退火Y2O3薄膜的结晶程度增加,退火后的择优取向仍为立方相(222)晶面结构;薄膜的硬度降低而弹性模量升高,薄膜与金刚石的结合力增加;薄膜的红外透过率略有降低;薄膜为柱状晶结构并存在大量非晶态。

Y2O3film of cubic( 222) preferred orientation was deposited on polished freestanding CVD diamond by the method of RF magnetron.Structure,mechanical and optical properties of the Y2O3films before and after annealing were investigated by using X-ray diffraction( XRD),nano-indentation scratch tester,Fourier transform infrared spectroscopy( FTIR) and TEM.The results show that the degrees of crystallinity of the Y2O3films increases after annealing and the preferred orientation is( 222).The hardness of the films decreases with the increasing annealing temperature,but the elastic modulus increases,the adhesion between the deposited film and diamond increases.The infrared transmittance of the composite Y2O3/diamond film has a slightly decline after annealing.The films present a columnar crystal structure in which there is a large amount of amorphous.