Al含量对(V,W,Al)N复合膜微观组织和抗氧化性能的影响

Influence of Al content on microstructure and oxidation resistance of ( V,W,Al) N composite films

采用多靶磁控溅射仪,制备不同Al含量的(V,W,Al)N复合膜。利用X射线衍射仪、纳米压痕仪和热处理炉及热失重分析仪对(V,W,Al)N复合膜的微观组织、力学性能及高温抗氧化性能进行表征。结果表明:当Al含量低于14.86 at%时,(V,W,Al)N复合膜存在面心立方结构(V,W)N、WN相及六方结构V2N相,当Al含量高于14.86 at%时,薄膜存在面心立方结构(V,W)N、WN相及六方结构V2N和AlN相;随Al原子百分含量的增加,复合膜的硬度呈先增大后减小的趋势,当Al原子百分含量达到14.86 at%时,其硬度最大值为35.5 GPa;随Al含量的增加,(V,W,Al)N复合膜抗氧化性能提高了至少200℃。讨论Al含量对(V,W,Al)N复合膜性能的影响。

A series of( V,W,Al) N composite films with different Al content were synthesized by the multi-target magnetron sputtering technique. The microstructure,mechanical and oxidation resistance properties of the composite films were investigated by X-ray diffraction( XRD),nano-indentation CSM,annealing oven and thermo-gravimetry( TG). The results show that( V,W,Al) N composite films have a face-centered cubic structure( V,W) N,WN phases and h-V2 N phase when the Al content is lower than 14. 86 at%,while( V,W,Al) N composite films have a face-centered cubic structure( V,W) N,WN phases and h-V2 N and h-AlN phases when the Al content is higher than 14. 86 at%. The( V,W,Al) N composite films reach a maximum hardness value of 35. 5 GPa when Al content is 14. 86 at%. The anti-oxidant properties of( V,W,Al) N composite films are increased at least 200 ℃ with the increasing of Al content. The influence mechanism of Al content on the properties of( V,W,Al) N composite films is discussed.