电子束物理气相沉积制备Ni基高温合金微观组织及力学性能

Microstructure and mechanical properties of Ni-based superalloy prepared by electron beam physical vapor deposition

以IC10高温合金作为基体,采用电子束物理气相沉积(Electron Beam Physical Vapor Deposition,EB-PVD)技术对与基体相同成分的IC10靶材进行蒸发并得到沉积态的Ni基高温合金。利用扫描电子显微镜、纳米压痕仪、万能拉伸机等研究了沉积态、热处理态Ni基高温合金的微观组织和力学性能。结果表明:沉积态合金呈柱状晶结构,晶粒细小,但存在微孔洞和微裂纹等缺陷;1200℃×2 h真空热处理后合金柱状晶转变为等轴晶,缺陷得到了明显改善;600℃以下合金与基体的结合强度较高,随温度升高结合强度降低。

Ni-based superalloy was deposited by evaporating IC10 superalloy on the substrate of IC10 superalloy by electron beam physical vapor deposition. The microstructure and mechanical properties of the alloys before and after heat treatment were investigated by means of scanning electronic microscopy,nano-hardness test and instron-universal tensile test. The results show that the as-deposited alloys are columnar crystals structure and the grains are very small. But the alloys exist some defects,like microporosities and micro-cracks. After vacuum heat treatment at 1200 ℃ for 2 h,columnar crystals break and turn into equiaxed grains and the defects decrease obviously. The adhesion strengths are high below 600 ℃ and decrease with the temperature increasing.