三极碳纳米管场发射显示屏的制作研究

Study on the Fabrication of Triode Field Emission Panel with Carbon Nanotubes Emitters

利用碳纳米管作为阴极材料的场致发射显示屏是一种新型的平板器件。介绍了三极结构碳纳米管场致发射显示屏的工作原理,基本结构以及寻址方式。重点讨论了在制作器件方面所存在的真空封装问题,荧光粉制作问题以及绝缘隔离层问题。在提出一种新型结构栅极制作工艺的基础上,成功地制作了三极碳纳米管场发射显示屏器件。

The field emission panel with carbon nanotubes emitters is new flat display. The work principle, basic structure and addressing mode of triode carbon nanotubes field emission panel are presented. The problem with vacuum package, fabrication of phosphor and insulating layer of field emission panel are also discussed. Based on the new gate electrode structure, the triode carbon nanotube field emission panel was fabricated successfully.