LMR—1型掩模缺陷(检查)激光修整仪

Development of LMR-1 Mask Defect Inspection-Laser Repair System

本文介绍了科学院光电技术研究所研制的我国第一代掩模缺陷(检查)激光修整仪。介绍了掩模缺陷的产生及其修补方法,国外主要激光修补仪产品,掩模缺陷激光修整原理和实验研究,着重介绍了LMR-1型掩模缺陷(检查)激光修整仪的结构原理和主要单元,系统功能和主要技术指标及仪器操作流程。该仪器可用于检查和修整2～6in(50～152mm)掩模版上的尺寸2～60μm的缺陷。

The paper introduced the first mask detect inspection-laser repairsystem developed in China by Institute of Optics and Electronics, Chinese Aca-demy of Sciences. It also presented mask defect types and causes, repair techno-logies, main laser repair system products abroad, principle and experimentalresearch on mask defect laser repairing.The emphases in this paper are placed on design principle, related primarytechniques, functions, specifications and operation procedures of model LMR-1mask inspection-laser repair system. The system can be used in repairing defe-cts of size 2-60μm on 2-6 inch masks and reticles.