摘要
针对传统压电陶瓷器件应用于微位移技术中难以实现高精度的问题,提出了一种柔性铰链微位移机构,对该机构的运动特性进行了理论分析,并利用有限元方法进行了仿真验证。研究了铰链间距及其关键几何参数对微位移机构性能的影响。结果表明:有限元仿真结果和理论分析结果相一致,利用ANSYS仿真可以确定几何参数对微位移机构性能的影响,结合理论分析可以提高微位移机构的设计效率和准确性,避免纯粹理论计算在结构设计上缺少仿真分析支撑的问题。实验结果验证了本文设计的微位移机构应用于超精密加工中具有很高的精度。
Aiming at enhance the positioning accuracy of a traditional piezoelectric ceramic device in a microdisplacement system, we propose the flexible hinge micro-displacement magnification mechanism. The motion characteristics of the mechanism is analyzed and simulated with the finite element method(FEM). The influence of the distance between two hinges and their key parameters are discussed. The analysis results show that the FEM simulation results agree well with the theoretical analysis results. The FEM simulation results can be used to determine the effect of the geometric parameters of the flexible hinge on the performance of the micro-displacement mechanism and can enhance the efficiency and accuracy of micro-displacement mechanism design. With the micro-displacement mechanism,the lack of simulation analysis support is avoided in carrying out structural design. The simulation results show that the microdisplacement mechanism we designed has a high precision in super-precision processing.
出处
《机械科学与技术》
CSCD
北大核心
2015年第7期985-988,共4页
Mechanical Science and Technology for Aerospace Engineering
基金
教育部博士点基金项目(20120032110059)
天津市科技型中小企业技术创新资金项目(13ZXCXGX56800)
天津市应用基础及前沿技术研究计划项目(13JCQNJC04700)资助
关键词
微位移机构
柔性铰链
有限元法
位移放大比
computer simulation
design
displacement magnification ratio
efficiency
errors
finite element method
flexible hinge
geometry
mechanisms
mesh generation
micro-displacement mechanism
piezoeleatric ceramics
stress concentration
structural design
