一种高灵敏度传感器——四棱镜光点检测器

A High Sensitive Sansor-Four Prism Light Shot Detector

本文介绍一种用于激光准直高精度直线度测量的高灵敏度光电信号检测器,该检测器根据激光束腰处聚焦光斑点小的特点,采用一种四棱镜光点会聚式检测器来接收激光束信息,它的检测灵敏度比传统的四棱镜式四象限位敏传感器高出一个数量级以上;该检测器对激光束平行漂移与角漂移表现出不同的检出特征,因而尤适合于做为激光束漂移补偿检测和直线度误差检测;该检测器还具有结构简单、使用方便等优点。

A high sensitive optoelectronic detector for the measure-ment ofstraightnessby laser collimation is presented in the paper. According to thesmall spot of laser beam waist, the detector receives laser beam informa-tion by using of a four prism spot convergent detector. Its sensitirity is amagnitude higher than the four prism quadrant position sensitive sensor.The detector presents different detecting characteristics for laser beam parallelwander and angular wander, so it is specially suitable for laser beam wandercompensating detection and straightness error detecting. The detector hasthe advantages of simple constitution and convenient operating.