一种新型2自由度微操作平台设计与试验

Design and experiment of a novel 2-DOF micro-manipulation stage

为了满足微操作平台结构紧凑、大运动行程、高固有频率、运动解耦和高运动精度的要求,设计了一种以杠杆柔性机构进行位移放大,以双复合平行四杆柔性机构为导向机构的新型二维微操作平台。采用伪刚体法和虚功原理建立了反映平台静刚度、位移放大率和固有频率的力学模型。制作样机并搭建了试验测试系统对平台性能进行测试,试验结果表明,平台位移放大率可达4.5倍,刚度为5.79 N/μm,固有频率为580 Hz,反映平台沿x和y方向的耦合度的指标分别为1.3‰和1.2‰,沿x和y轴方向的重复定位精度分别为0.68μm和0.72μm。所以,所设计的平台实现了设计目标。

A novel 2-DOF micro-manipulation stage is presented,in order to meet the requirements of compact structure,large motion range,high natural frequency,decoupling motion and high motion accuracy.The leverage flexure mechanism is designed for displacement amplification,and the double parallel four-bar flexure mechanism serves as the guide.The mechanical model characterized by static stiffness,displacement magnification and natural frequency is worked out by means of the pseudo rigid-body method and the virtual working principle.The prototype is manufactured;the experimental system is set up for performance test.Experimental results show that the rate of displacement amplification is up to 4.5,the stiffness is 5.79 N/μm,and the natural frequency is 580 Hz.The index indicating the coupling degree along the x and y directions is 1.3‰and 1.2‰respectively;the accuracy of repeat positioning along the x and y directions is 0.68μm and 0.72μm respectively.Therefore,via the presented stage,the design goals can be achieved.