CVD ZnSe光学透镜超精密加工工艺优化技术研究

Study on optimization technology of ultra-precision processing for CVD ZnSe optical lens

基于对某研究所近半年CVD Zn Se光学透镜及质量情况统计数据的分析,找出了导致CVD ZnSe光学透镜合格率低的主要超差指标为中心厚度超差、表面疵病超差、面形超差和表面粗糙度超差,进一步分析发现表面疵病与表面粗糙度超差是导致中心厚度和形面超差的根本原因。通过对球面透镜和非球面透镜加工流程进行分析,明确了抛光和单点金刚石车削过程为造成表面粗糙度超差和表面疵病超差的主要工序。分别对抛光和单点金刚石车削加工过程中关键工艺参数进行了试验研究,发现了各个工艺参数对产品质量指标的影响规律,并最终确定了最优加工工艺方案,有效提高了CVD ZnSe光学透镜超精密加工的产品合格率。

Based on the analysis of the quality statistics of CVD ZnSe optical lens in the past six months of a certain research institute,it is found that the main super-poor indicators that lead to the low pass rate of CVD ZnSe optical lens are the center thickness,surface defects,and surface roughness.Furthermore,it is found that surface defects and surface roughness are the fundamental reasons that lead to the extreme thickness and shape of the center.By analyzing the processing flow of spherical lens and aspheric lens,it is clear that the polishing and single point diamond turning process is the main process that causes the surface roughness and surface defects.The key process parameters in polishing and single point diamond turning process were tested and studied respectively.The effects of each process parameter on product quality index were found,and the optimal process scheme was finally determined.The yield of CVD ZnSe optical lens was improved effectively.