POLYMERIZATION OF OCTAFLUORO-CYCLOBUTANE IN GLOW DISCHARGE——MECHANISM OF THE COMPETITIVE ABLATION AND POLYMERIZATION (CAP)
POLYMERIZATION OF OCTAFLUORO-CYCLOBUTANE IN GLOW DISCHARGE——MECHANISM OF THE COMPETITIVE ABLATION AND POLYMERIZATION (CAP)
摘要
In glow discharge there are two contrary processes for fluorocarbons, i.e. ablation and polymerization. The balance of these two processes has great effects upon the deposition rate, structure and properties of the polymer films to be formed. It is generally believed that in plasma ablation there is a
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