气悬浮技术在无接触输运领域的研究进展

Review on Contactless Transport Using Pneumatic Levitation

在半导体、食品和医药等行业的生产制造过程中需要输运清洁和易损的产品。传统的接触式输运方式容易造成产品表面出现刮痕、裂纹,同时还存在静电和金属污染等诸多问题,已无法适应技术发展的需求。无摩擦非接触的方式在满足精度、洁净度和可靠性等要求方面具有极大优势。综述了国内外无接触悬浮技术的研究现状,概括对比了不同技术的特点、应用对象和场合、环境限制及复杂性。气悬浮具有清洁无污染、不发热、不生磁且构建简单等优势,是当前无接触输运领域的主流技术。气悬浮从实现方式上可分为负压吸浮和正压悬浮,着重阐述了两种方式的实现原理、研究现状及应用进展。在此基础上,深入分析了完全无接触气浮输运的实现方式、研究现状及存在的问题,并进一步指出无接触气浮输运技术的发展趋势,以期推动我国在相关领域的产业升级。

Many industries, such as semiconductor, food and pharmaceuticals, require contactless transport of delicate or clean products during production process. The traditional contact method cannot accommodate the developing technology since it easily causes surface scratching and trace to the product, and also has some problems such as static electricity and contamination. The non-contact method shows great advantages in satisfying the requirements of precision, cleanness and reliability. Research progress of the non-contact levitation is reviewed, and comparisons of characteristics, applications, environment limitation and complexness are made among different implementations. The pneumatic levitation has several advantages such as clean, magnetic free, and generating little heat, and therefore comes to dominate in the non-contact conveying field. According to the principle, pneumatic levitation can be categorized into two types: vacuum suction and air cushion, and the research progress and its applications are emphasized. Based on this, completely contactless transport and positioning are analyzed in the aspects of implementation, research progress and existing problems. Furthermore, prospective of future research on contactless transport is analyzed, and the technology is expected to promote industrial upgrading in relevant fields.