小口径非球面斜轴磨削及磁流变抛光组合加工工艺及装备技术研究

Development on Synergistic Process and Machine Tools Integrated Inclined Axis Grinding and Magnetorheological Polishing for Small Aspheric Surface

为提高小口径非球面模具加工效率和加工精度,提出一种结合斜轴超精密磨削和斜轴磁流变抛光的组合加工方法,将两种超精密加工方法集成在一台机床上,以缩短装夹时间以及降低装夹误差。研制新型的小口径非球面超精密复合加工机床,对直径Ф6.6 mm的非球面碳化钨模具进行了加工试验。斜轴磨削后加工表面粗糙度达到R_a 6.8 nm,斜轴磁流变抛光后表面粗糙度达到R_a 0.7 nm,面型精度可以达到PV 221 nm。结果表明,所开发的小口径非球面超精密复合加工装备能达到加工要求,可有效提高加工精度和加工效率。

To improve machining efficiency and accuracy for small aspheric molds, a synergistic process integrated inclined axis grinding and magnetorheological polishing is proposed. It can reduce clamping time and installation error to integrate the two ultra-precision processes on one machine. A new type of machining tool is developed. Grinding experiments for aspheric molds in diameter Ф6.6 mm are carried out. Surface roughness Ra of is largely improved from Ra 6.8 nm after grinding to Ra 0.7 nm after magnetorheological polishing. The ground surface is reached PV(Peak-Valley) 221 nm after polishing. The experimental results showed that the synergistic process may improve efficiency and accuracy for machining small aspheric molds.