基于谐振原理的石英音叉数字温度传感器

Digital Quartz Tuning Fork Temperature Sensor Based on Resonant Principle

采用石英晶体热敏新切型(ZY切型)和音叉结构,设计了一种工作于弯曲振动模式,输出为频率信号的数字温度传感器。针对温度传感器的要求,对石英晶体双旋切角的频率温度特性和机电耦合系数进行分析,确定热敏切型,使其具有较高的频率温度系数和机电耦合系数。对石英音叉结构和振动模式进行有限元仿真分析,优化传感器结构,并采用微机械加工技术制作音叉。实验结果表明,该传感器谐振频率对温度极其敏感并具有良好的频率温度线性关系,在0°C到100°C的测温范围内,频率温度系数为70×10^(-6)°C^(-1),分辨力为0.002°C,测温精度为±0.05°C,低功耗小于0.03μw。

A digital frequency output signal temperature sensor is designed using a new quartz crystal thermal cut(ZY-cut) and a tuning fork shaped structure, which works in the flexural vibration mode. In view of the temperature sensor, the frequency-temperature characteristics of the quartz crystal doubly rotation angle cut and electromechanical coupling coefficients are analyzed to determine its thermal cut with extremely sensitive temperature and electromechanical coupling coefficients. The finite element method is used to simulate the structure and vibration mode of the quartz tuning fork for optimizing the structure of the sensor, using the micromachining technology to manufacture the quartz tuning fork. Experimental results indicate that the resonant frequency of the sensor is high sensitive to the temperature and has a good linear relationship, the temperature coefficient of the frequency up to 70×10^(-6)°C^(-1) with a temperature ranging from 0 °C to 100 °C, the sensor resolution is approximately 0.002 °C and the sensor accuracy is approximately ± 0.05 °C, the power consumption is smaller than 0.03 μw.